INDUCTIVELY COUPLED PLASMA ICP

Icp energy

An inductively coupled plasma (ICP) or transformer coupled plasma (TCP) is a type of plasma source in which the energy is supplied by electric currents which are produced by electromagnetic induction, that is, by time-varying magnetic fields. There are three types of ICP geometries: planar (Fig. 3 (a)), cylindrical (Fig. 3 (b)), and half-toroidal (Fig. 3 (c)). In planar geometry, the electrode is a length of flat metal wound like a spiral (or coil). In cylindrical geometry, it. Plasma can range between ~6,000 K and ~10,000 K and are usually several orders of magnitude greater than the temperature of the neutral species . Temperatures of argon ICP plasma discharge are typically ~5,500 to 6,500 K and are therefore comparable.